| CPC H01J 49/0409 (2013.01) | 6 Claims |

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1. A mass spectrometry method using a mass spectrometer including a first moving mechanism configured to move a sample stage in a first direction in a plane parallel to the sample stage and a second moving mechanism configured to move the first moving mechanism in a second direction different from the first direction in a plane parallel to the sample stage, the mass spectrometry method comprising:
moving the sample stage in the first direction with the first moving mechanism to cause an irradiation point of excitation beam to be intermittently moved between a plurality of measurement points two-dimensionally arranged on a sample placed on the sample stage with the first direction as a main movement direction, and performing mass spectrometry at each of the plurality of measurement points; and
accelerating the sample stage when the sample stage is moved by the first moving mechanism is larger than accelerating the sample stage when the sample stage is moved by the second moving mechanism.
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