US 12,431,337 B2
Plasma processing device and retractable sealing part thereof
Zhihao Wang, Shanghai (CN); and Lei Wu, Shanghai (CN)
Assigned to ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA, Shanghai (CN)
Filed by ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA, Shanghai (CN)
Filed on May 26, 2022, as Appl. No. 17/825,874.
Claims priority of application No. 202110610144.9 (CN), filed on Jun. 1, 2021.
Prior Publication US 2022/0384157 A1, Dec. 1, 2022
Int. Cl. H01J 37/32 (2006.01)
CPC H01J 37/32642 (2013.01) [H01J 37/32174 (2013.01); H01J 37/32568 (2013.01); H01J 2237/2006 (2013.01)] 19 Claims
OG exemplary drawing
 
19. A retractable sealing part, arranged in or near a radio-frequency circuit of a plasma processing device, and comprising:
a bellows assembly, having a first end and a second end; and
a sleeve assembly, comprising a first sleeve and a second sleeve, wherein the first sleeve is arranged close to the first end of the bellows assembly, and the second sleeve is arranged close to the second end of the bellows assembly; free ends of the first sleeve and the second sleeve are overlapped with each other to form a radio-frequency shielding space when the first sleeve and the second sleeve slide relatively; the bellows assembly is located in the radio-frequency shielding space; and the sleeve assembly is a conductor; and
an insulating buffer layer arranged between the first sleeve and the second sleeve, the insulating buffer layer contacts the first sleeve and the second sleeve, respectively.