US 12,431,333 B2
Systems, devices, and methods for aligning a particle beam and performing a non-contact electrical measurement on a cell and/or non-contact electrical measurement cell vehicle using a registration cell
Indranil De, Alameda, CA (US); Jeremy Cheng, San Jose, CA (US); Thomas Sokollik, Santa Clara, CA (US); Yoram Schwarz, Santa Clara, CA (US); Stephen Lam, Fremont, CA (US); and Xumin Shen, Santa Clara, CA (US)
Assigned to PDF SOLUTIONS, INC., Santa Clara, CA (US)
Filed by PDF SOLUTIONS, INC., Santa Clara, CA (US)
Filed on May 13, 2024, as Appl. No. 18/663,041.
Application 18/663,041 is a continuation of application No. 18/108,583, filed on Feb. 11, 2023, granted, now 12,020,897.
Application 18/108,583 is a continuation of application No. 17/739,063, filed on May 6, 2022, granted, now 11,605,526, issued on Mar. 14, 2023.
Application 17/739,063 is a continuation of application No. 17/061,401, filed on Oct. 1, 2020, granted, now 11,328,899, issued on May 10, 2022.
Claims priority of provisional application 62/945,558, filed on Dec. 9, 2019.
Claims priority of provisional application 62/909,046, filed on Oct. 1, 2019.
Prior Publication US 2024/0304414 A1, Sep. 12, 2024
Int. Cl. G01R 31/265 (2006.01); G01R 31/306 (2006.01); H01J 37/30 (2006.01); H01J 37/317 (2006.01)
CPC H01J 37/3175 (2013.01) [G01R 31/2653 (2013.01); G01R 31/306 (2013.01); H01J 37/3005 (2013.01); H01J 2237/31762 (2013.01)] 5 Claims
OG exemplary drawing
 
1. A computer-readable medium storing a set of instructions thereon, which when executed by a processor cause the processor to:
receive a recipe for a die included in a wafer, the die including a plurality of chips, each chip of the plurality of chips being divided into a plurality of tiles, each tile including a non-contact electronic measurement (NCEM)-enabled NCEM-enabled registration cell and a plurality of NCEM-enabled fill cells, the recipe including a position for the die within the wafer, a position of the NCEM-enabled registration cell, and a position of each NCEM-enabled cell of the plurality NCEM-enabled cells;
determine an expected position of a NCEM-enabled registration cell included a tile of the plurality of tiles;
direct an electron beam toward the NCEM-enabled registration cell;
receive an indication of a response of the NCEM-enabled registration cell to the electron beam;
determine an actual position of the NCEM-enabled registration cell using the response;
align the electron beam using the actual position of the NCEM-enabled registration cell;
direct the aligned electron beam toward an NCEM-enabled fill cell of the plurality of NCEM-enabled fill cells;
receive a response of the NCEM-enabled fill cell to the aligned electron beam; and
provide an indication of the response to a processor.