US 12,431,330 B2
Helical voltage standoff
Diana C. Gronski, Salisbury, MA (US); Alicia Chen, Malden, MA (US); Craig R. Chaney, Gloucester, MA (US); and Adam M. McLaughlin, Merrimac, MA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Sep. 30, 2022, as Appl. No. 17/957,095.
Prior Publication US 2024/0112883 A1, Apr. 4, 2024
Int. Cl. H01J 37/317 (2006.01); H01L 21/265 (2006.01)
CPC H01J 37/3171 (2013.01) [H01L 21/26513 (2013.01); H01J 2237/31701 (2013.01)] 19 Claims
OG exemplary drawing
 
1. An insulator, comprising:
a shaft having a first end and a second end; and
a helical protrusion spiraling around the shaft, wherein the helical protrusion comprises a lip disposed at its distal end extending toward the second end.
 
13. An insulator, comprising:
a shaft having a first end and a second end;
a helical protrusion spiraling around the shaft; and
a sheath extending outward from the shaft and surrounding a portion of the shaft, wherein a sheath helical protrusion is disposed on an interior surface of the sheath facing the shaft; wherein at least one of the helical protrusion or the sheath helical protrusion comprises a lip disposed at its distal end.