US 12,431,325 B2
Sample image observation device and method for same
Yuta Imai, Tokyo (JP); and Junichi Katane, Tokyo (JP)
Assigned to HITACHI HIGH-TECH CORPORATION, Tokyo (JP)
Appl. No. 17/928,691
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
PCT Filed Jul. 14, 2020, PCT No. PCT/JP2020/027381
§ 371(c)(1), (2) Date Nov. 30, 2022,
PCT Pub. No. WO2022/013945, PCT Pub. Date Jan. 20, 2022.
Prior Publication US 2023/0230799 A1, Jul. 20, 2023
Int. Cl. H01J 37/22 (2006.01); H01J 37/26 (2006.01); H01J 37/28 (2006.01)
CPC H01J 37/222 (2013.01) [H01J 37/265 (2013.01); H01J 37/28 (2013.01); H01J 2237/226 (2013.01); H01J 2237/24578 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A sample image observation device, comprising:
scanning electron microscope (SEM) including:
an electron gun configured to emit an electron beam;
a detector configured to detect secondary electrons from a sample and generate detection signals of the secondary electrons; and
a computer, coupled to the SEM, programmed to:
divide an observation region of the sample into a plurality of sections,
determine a size of each section based on a spatial distribution of focal point positions of the electron beam for irradiation, and
execute restoration processing on an image which is acquired by irradiating each of a plurality of sections with the electron beam, based on scanning characteristics of the respective sections.