US 12,431,322 B2
System and method for handling samples for study in a charged particle apparatus, such as a transmission electron microscope
Jiří Benda, Brno (CZ); Vojtěch Doležal, Brno (CZ); Tomáš Trnkócy, Brno (CZ); Jaroslav Hadzima, Trnava (SK); Martin Čechmánek, Rovečné (CZ); and Ondřej Sháněl, Brno (CZ)
Assigned to FEI Company, Hillsboro, OR (US)
Filed by FEI Company, Hillsboro, OR (US)
Filed on Mar. 21, 2023, as Appl. No. 18/124,465.
Claims priority of application No. 22163221 (EP), filed on Mar. 21, 2022.
Prior Publication US 2023/0298849 A1, Sep. 21, 2023
Int. Cl. H01J 37/20 (2006.01)
CPC H01J 37/20 (2013.01) [H01J 2237/2007 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A sample handling and storage system, comprising:
a storage apparatus for storing a plurality of samples;
a Charged Particle Apparatus (CPA) at a location remote from said storage apparatus; and
a transfer device that is releasably connectable to said storage apparatus and said CPA, wherein said system is arranged for transferring a sample from said storage apparatus to said transferring device when said transfer device is connected to said storage apparatus, and arranged for transferring said sample from said transfer device to said CPA when connected to said CPA;
wherein the system comprises at least one suction disc mechanism for securing said connection between said transfer device and at least one of said storage apparatus and said CPA.