US 12,431,319 B2
Charged particle beam device and image generation method
Hiroki Hashiguchi, Tokyo (JP); Kazuki Yagi, Tokyo (JP); Ruth Shewmon Bloom, Oakland, CA (US); and Bryan W. Reed, San Leandro, CA (US)
Assigned to JEOL Ltd., Tokyo (JP)
Filed by JEOL Ltd., Tokyo (JP)
Filed on Sep. 7, 2022, as Appl. No. 17/939,309.
Claims priority of application No. 2021-146210 (JP), filed on Sep. 8, 2021.
Prior Publication US 2023/0072991 A1, Mar. 9, 2023
Int. Cl. H01J 37/04 (2006.01); G01N 23/04 (2018.01); H01J 37/00 (2006.01); H01J 37/28 (2006.01)
CPC H01J 37/045 (2013.01) [G01N 23/04 (2013.01); H01J 37/00 (2013.01); H01J 37/28 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A charged particle beam device that scans a specimen with a charged particle beam and generates an image based on a detected signal from a detector that detects a signal generated from the specimen based on the scan performed by the charged particle beam, the charged particle beam device comprising:
a blanker that performs blanking of the charged particle beam;
an image acquisition unit that sets a duty ratio of the blanking, and acquires a plurality of images by controlling the blanking during the scan performed by the charged particle beam according to the set duty ratio, the plurality of images including pixels corresponding to a region of the specimen that is irradiated with the charged particle beam and pixels corresponding to a region of the specimen that is not irradiated with the charged particle beam; and
an integrated image generation unit that generates an integrated image by integrating the plurality of acquired images,
wherein the image acquisition unit increases a dose of the charged particle beam used when acquiring the plurality of images in proportion to the number of images to be acquired.