US 12,429,502 B2
Probe assembly for test and burn-in having a compliant contact element
Hock Soon Sim, Singapore (SG); and Zhiyun Ke, Singapore (SG)
Assigned to KES SYSTEMS & SERVICE (1993) PTE LTD., Singapore (SG)
Filed by KES SYSTEMS & SERVICE (1993) PTE LTD., Singapore (SG)
Filed on Apr. 8, 2022, as Appl. No. 17/716,094.
Claims priority of provisional application 63/173,852, filed on Apr. 12, 2021.
Prior Publication US 2022/0326280 A1, Oct. 13, 2022
Int. Cl. G01R 1/073 (2006.01); G01R 1/067 (2006.01)
CPC G01R 1/07357 (2013.01) [G01R 1/06738 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A vertical probe assembly comprising:
a resilient compliant probe formed from a conductive material, the probe comprising an upper portion, a lower portion, and a resilient stopper structure positioned between the upper and lower portions of the probe;
a first guide plate having a first hole;
a second guide plate having a second hole, the second guide plate being positioned beneath the first guide plate; and
a third guide plate having a third hole, the third guide plate being positioned beneath the first and second guide plates,
wherein the first, second, and third guide plates are formed from a non-conductive substrate and separated by one or more spacers,
wherein the first, second, and third holes are vertically aligned to receive the probe therethrough,
wherein the upper and lower portions of the probe are non-coaxial and parallel to one another, and
wherein the probe is positioned within the first, second, and third holes such that the upper portion extends through the first hole, the lower portion extends through the second and third holes, and the stopper structure contacts a surface of the second guide plate that faces the first guide plate,
wherein the first and third guide plates are configured to move in opposing horizontal directions to tilt the probe after it has been received in the vertically aligned holes, and
wherein the upper and lower portions of the probe are configured to separately deform around the resilient stopper in response to sliding the first and third guide plates in opposing horizontal directions to tilt the probe.