US 12,429,042 B2
Torsion pump and chemical liquid supply unit
Young Jun Son, Cheonan-si (KR); Byoung Doo Choi, Cheonan-si (KR); Young Un Yun, Anyang-si (KR); Woo Ram Lee, Seoul (KR); Sung Chul Jung, Cheonan-si (KR); Woo Sin Jung, Cheonan-si (KR); and Ki Sang Eum, Cheonan-si (KR)
Assigned to Semes Co., Ltd., Chungcheongnam-do (KR)
Filed by SEMES CO., LTD., Cheonan-si (KR)
Filed on Oct. 17, 2022, as Appl. No. 17/967,281.
Claims priority of application No. 10-2021-0141253 (KR), filed on Oct. 21, 2021.
Prior Publication US 2023/0131569 A1, Apr. 27, 2023
Int. Cl. F04B 43/08 (2006.01)
CPC F04B 43/084 (2013.01) 20 Claims
OG exemplary drawing
 
1. A torsion pump, comprising:
a tube including an upper body, a lower body, and a pump chamber communicating with a chemical liquid inlet and a chemical liquid outlet; and
a driving unit for transmitting rotational force to the tube to twist the tube,
wherein the upper body has a first central axis and the lower body has a second central axis, and
wherein the tube has a non-linear shape when the tube is not twisted such that the first central axis and the second central axis cross each other at a bent portion of the tube.