US 12,428,724 B2
Contaminant trap system for a reactor system
Ankit Kimtee, Phoenix, AZ (US)
Assigned to ASM IP Holding B.V., Almere (NL)
Filed by ASM IP Holding B.V., Almere (NL)
Filed on May 26, 2022, as Appl. No. 17/825,460.
Claims priority of provisional application 63/194,721, filed on May 28, 2021.
Prior Publication US 2022/0384063 A1, Dec. 1, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. C23C 16/44 (2006.01); B01D 45/08 (2006.01); B01J 4/00 (2006.01); B01J 19/00 (2006.01); B08B 15/00 (2006.01); B08B 15/04 (2006.01); H01L 21/67 (2006.01)
CPC C23C 16/4412 (2013.01) [B01D 45/08 (2013.01); B01J 4/001 (2013.01); B01J 19/006 (2013.01); B08B 15/00 (2013.01); B08B 15/04 (2013.01); H01L 21/67017 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A contaminant trap system of a reactor system, comprising:
a trap housing comprising a housing outer wall;
a first baffle plate disposed in the trap housing, wherein the first baffle plate comprises a sintered material, wherein the first baffle plate is configured to allow a fluid to pass therethrough as the fluid passes from a first end to a second end of the trap housing, and wherein the sintered material is configured to collect contaminants from the fluid as the fluid contacts the sintered material,
wherein the first baffle plate comprises:
a first aperture spanning through a first baffle plate body between a first top baffle plate surface and a first bottom baffle plate surface of the first baffle plate; and
a first body portion; and
a first complementary baffle plate comprising a second sintered material, wherein the first complementary baffle plate is disposed in the trap housing in series with the first baffle plate between the first end and the second end of the trap housing, wherein the first complementary baffle plate comprises:
a first complementary aperture spanning through a first complementary baffle plate body between a first top complementary baffle plate surface and a first bottom complementary baffle plate surface of the first complementary baffle plate; and
a first complementary body portion,
wherein the first baffle plate and the first complementary baffle plate are comprised in a baffle plate stack, and
wherein the first baffle plate and the first complementary baffle plate are disposed in a baffle plate orientation in the trap housing wherein at least a portion of the first aperture of the first baffle plate and at least a portion of the first complementary body portion of the first complementary baffle plate are aligned along a first axis spanning between the first end and the second end of the trap housing, and such that at least a portion of the first body portion of the first baffle plate and at least a portion of the first complementary aperture of the first complementary baffle plate are aligned along a second axis spanning between the first end and the second end of the trap housing.