US 11,770,933 B2
Memory device including row decoder
Jin Ho Kim, Icheon-si (KR); Young Ki Kim, Icheon-si (KR); Sang Hyun Sung, Icheon-si (KR); Sung Lae Oh, Icheon-si (KR); and Byung Hyun Jeon, Icheon-si (KR)
Assigned to SK hynix Inc., Icheon-si (KR)
Filed by SK hynix Inc., Icheon-si (KR)
Filed on Feb. 2, 2021, as Appl. No. 17/165,097.
Claims priority of application No. 10-2020-0114973 (KR), filed on Sep. 8, 2020.
Prior Publication US 2022/0077172 A1, Mar. 10, 2022
Int. Cl. H10B 43/40 (2023.01); H01L 23/522 (2006.01); H10B 41/27 (2023.01); H10B 41/41 (2023.01); H10B 43/27 (2023.01)
CPC H10B 43/40 (2023.02) [H01L 23/5226 (2013.01); H10B 41/27 (2023.02); H10B 41/41 (2023.02); H10B 43/27 (2023.02)] 20 Claims
OG exemplary drawing
 
1. A memory device comprising:
a substrate defined with a first cell region and a second cell region, disposed in a first direction, and a row decoder region disposed between the first cell region and the second cell region;
a peripheral circuit defined in the first and second cell regions of the substrate;
a plurality of pass transistors defined in the row decoder region of the substrate;
a plurality of bottom wiring layers disposed in a first dielectric layer, which covers the peripheral circuit and the plurality of pass transistors;
a memory cell array defined on the first dielectric layer;
a second dielectric layer, defined on the first dielectric layer, that covers the memory cell array;
a plurality of top wiring layers disposed in a third dielectric layer, which is defined on the second dielectric layer; and
a plurality of global lines, disposed in the row decoder region, that transfer operating voltages to the plurality of pass transistors,
wherein the plurality of global lines are disposed only in a bottom wiring layer from among the plurality of bottom wiring layers and the plurality of top wiring layers.