US 11,769,681 B2
Transfer robot and substrate processing apparatus having the same
Kyung Hee Jeon, Osan-si (KR); Dong Sun Ko, Osan-si (KR); and Hun Hee Na, Seoul (KR)
Assigned to WONIK IPS CO., LTD., Pyeongtaek-si (KR)
Filed by WONIK IPS CO., LTD., Pyeongtaek-si (KR)
Filed on Mar. 12, 2021, as Appl. No. 17/200,510.
Claims priority of application No. 10-2020-0035763 (KR), filed on Mar. 24, 2020.
Prior Publication US 2021/0305075 A1, Sep. 30, 2021
Int. Cl. H01L 21/677 (2006.01); H01L 21/687 (2006.01)
CPC H01L 21/67766 (2013.01) [H01L 21/67742 (2013.01); H01L 21/68707 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A substrate processing system comprising:
a transfer module (300) provided with a transfer robot (500) configured to transfer substrates (10);
one or more dual process modules (100) each of which is installed at one side of the transfer module (300) so that two substrates (10) are accessible at the same time and on which a pair of substrate support units (13) configured to respectively seat the two substrates (10) thereon are disposed horizontally; and
one or more single process modules (200) each of which is installed at one side of the transfer module (300) so that one substrate (10) is accessible and on which one or more substrate support units (13) configured to seat the substrates (10) thereon are provided,
wherein the transfer robot (500) comprises a first substrate seating unit (510a) and a second substrate seating unit (510b), each of which has a seating surface (11), on which the substrate (10) is seated, and a first coupling unit (502), to which the first substrate seating unit (510a) and the second substrate seating unit (510b) are coupled, and
wherein each of the seating surface are disposed on the same first plane, and
at least one of the first substrate seating unit (510a) or the second substrate seating unit (510b) is installed to be rotatable about a vertical rotation axis (C1) formed by the first coupling unit (502) so as to be disposed in a region in which the at least one of the first substrate seating unit (510a) or the second substrate seating unit (510b) does not interfere with the substrate transfer when the substrates (10) are transferred.