CPC G03F 1/24 (2013.01) [H01L 21/0274 (2013.01)] | 20 Claims |
1. A reflective mask, comprising:
a central region; and
a first peripheral region and a second peripheral region at opposite sides of the central region, respectively,
wherein the first peripheral region includes:
a first out-of-band region having:
a first edge region extending in a first direction, and
a first expansion region between the first edge region and the central region, and
a first outer auxiliary region adjacent to the first expansion region of the first out-of-band region in the first direction, the first outer auxiliary region having a first auxiliary pattern region.
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