US 12,426,512 B2
Actuator device
Daiki Suzuki, Hamamatsu (JP); Takuma Osaki, Hamamatsu (JP); Makoto Nozaki, Hamamatsu (JP); and Kota Sugizaki, Hamamatsu (JP)
Assigned to HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
Filed by HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
Filed on May 4, 2022, as Appl. No. 17/736,136.
Claims priority of application No. 2021-080857 (JP), filed on May 12, 2021.
Prior Publication US 2022/0367782 A1, Nov. 17, 2022
Int. Cl. H10N 30/87 (2023.01); G02B 26/08 (2006.01); H10N 30/20 (2023.01); H10N 30/80 (2023.01)
CPC H10N 30/875 (2023.02) [G02B 26/0816 (2013.01); H10N 30/20 (2023.02); H10N 30/802 (2023.02)] 9 Claims
OG exemplary drawing
 
1. An actuator device comprising:
a support body;
a metal substrate supported by the support body;
a bonding member bonding the support body and the metal substrate; and
a vibration element disposed on a main body portion included in the metal substrate,
wherein the metal substrate further includes a movable portion, a first extending portion and a second extending portion extending from the main body portion such that the movable portion is located between the first extending portion and the second extending portion, a first coupling portion coupling the first extending portion and the movable portion, a second coupling portion coupling the second extending portion and the movable portion, and a connection portion connected to at least one of the first extending portion and the second extending portion,
the connection portion includes a first region facing a portion of the support body in a thickness direction of the metal substrate, a second region being continuous from the first region, and a third region being continuous from the second region and connected to at least one of the first extending portion and the second extending portion,
when viewed in the thickness direction of the metal substrate, a width of the second region in a direction perpendicular to a connection direction in which the third region is connected to the second region is larger than a width of the third region in the direction perpendicular to the connection direction,
the bonding member includes a first portion disposed between the portion of the support body and the first region, and a second portion being continuous from the first portion, and
the second portion reaches the second region but does not reach the third region.