US 12,426,281 B2
Multi-capacitor module including a nested metal-insulator-metal (MIM) structure
Yaojian Leng, Vancouver, WA (US)
Assigned to Microchip Technology Incorporated, Chandler, AZ (US)
Filed by Microchip Technology Incorporated, Chandler, AZ (US)
Filed on Jul. 27, 2022, as Appl. No. 17/874,482.
Claims priority of provisional application 63/356,068, filed on Jun. 28, 2022.
Prior Publication US 2023/0420495 A1, Dec. 28, 2023
Int. Cl. H10D 1/00 (2025.01); H01L 23/522 (2006.01); H10D 1/68 (2025.01)
CPC H10D 1/042 (2025.01) [H01L 23/5223 (2013.01); H10D 1/692 (2025.01); H10D 1/716 (2025.01)] 11 Claims
OG exemplary drawing
 
1. A method, comprising:
forming a tub opening in a dielectric region;
depositing a first conformal metal extending into the tub opening;
depositing a first insulator layer extending into an opening defined by the first conformal metal;
depositing a second conformal metal extending into an opening defined by the first insulator layer;
depositing a second insulator layer extending into an opening defined by the second conformal metal;
depositing a third electrode metal extending into an opening defined by the second insulator layer; and
performing a planarization process defining a nested metal-insulator-metal (MIM) structure in the tub opening;
wherein after the planarization process:
a remaining portion of the first insulator layer defines a first insulator;
a remaining portion of the second conformal metal defines a second electrode;
a remaining portion of the second insulator layer defines a second insulator; and
a remaining portion of the third electrode metal defines a third electrode;
wherein the first electrode, the second electrode, and the first insulator define a first capacitor; and
wherein the second electrode, the third electrode, and the second insulator define a second capacitor electrically connected in series with the first capacitor;
forming a first electrode connection element electrically connected to the first electrode; and
forming a third electrode connection element electrically connected to the third electrode;
wherein the third electrode connection element is electrically insulated from the first electrode connection element.