US 12,425,002 B2
Top electrodes and dielectric spacer layers for bulk acoustic wave resonators
Alireza Tajic, Winter Springs, FL (US); Paul Stokes, Orlando, FL (US); and Robert Aigner, Ocoee, FL (US)
Assigned to Qorvo US, Inc., Greensboro, NC (US)
Filed by Qorvo US, Inc., Greensboro, NC (US)
Filed on Apr. 17, 2024, as Appl. No. 18/637,566.
Application 18/637,566 is a continuation of application No. 18/192,312, filed on Mar. 29, 2023, granted, now 12,081,194.
Application 18/192,312 is a continuation of application No. 17/821,906, filed on Aug. 24, 2022, granted, now 11,722,119, issued on Aug. 8, 2023.
Application 17/821,906 is a continuation of application No. 16/525,858, filed on Jul. 30, 2019, granted, now 11,502,667, issued on Nov. 15, 2022.
Claims priority of provisional application 62/792,113, filed on Jan. 14, 2019.
Prior Publication US 2024/0267022 A1, Aug. 8, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. H03H 9/13 (2006.01); H03H 9/02 (2006.01); H03H 9/17 (2006.01); H03H 9/54 (2006.01); H10N 30/87 (2023.01); H10N 30/88 (2023.01)
CPC H03H 9/132 (2013.01) [H03H 9/02062 (2013.01); H03H 9/02086 (2013.01); H03H 9/173 (2013.01); H03H 9/175 (2013.01); H03H 9/54 (2013.01); H10N 30/87 (2023.02); H10N 30/883 (2023.02)] 20 Claims
OG exemplary drawing
 
1. A bulk acoustic wave (BAW) resonator comprising:
a bottom electrode;
a piezoelectric layer over the bottom electrode;
a top electrode over the piezoelectric layer, the top electrode defining a central region and a border (BO) region that extends about a periphery of the central region, the BO region comprising an outer BO region and an inner BO region that is between the outer BO region and the central region; and
a dielectric spacer layer arranged between the top electrode and the piezoelectric layer at the BO region, the dielectric spacer layer being in contact with the piezoelectric layer under the outer BO region and the inner BO region.