US 12,424,719 B2
Compact surface transmission line waveguides with vertical ground planes
Telesphor Kamgaing, Chandler, AZ (US); Neelam Prabhu Gaunkar, Chandler, AZ (US); Georgios C. Dogiamis, Chandler, AZ (US); Veronica Strong, Hillsboro, OR (US); and Aleksandar Aleksov, Chandler, AZ (US)
Assigned to Intel Corporation, Santa Clara, CA (US)
Filed by Intel Corporation, Santa Clara, CA (US)
Filed on Jun. 17, 2021, as Appl. No. 17/350,791.
Prior Publication US 2022/0407202 A1, Dec. 22, 2022
Int. Cl. H01P 3/00 (2006.01); H01L 23/15 (2006.01); H01L 23/498 (2006.01); H01L 23/66 (2006.01)
CPC H01P 3/003 (2013.01) [H01L 23/15 (2013.01); H01L 23/49827 (2013.01); H01L 23/49838 (2013.01); H01L 23/66 (2013.01); H01L 2223/6616 (2013.01); H01L 2223/6627 (2013.01)] 24 Claims
OG exemplary drawing
 
1. A coplanar waveguide, comprising:
a core;
a signal trace on the core, wherein the signal trace has a first edge and a second edge;
a first ground trace over the core, wherein the first ground trace is adjacent to the first edge of the signal trace;
a first ground via plane below the first ground trace, the first ground via plane extending substantially along a length of the first ground trace;
a second ground trace over the core, wherein the second ground trace is adjacent to the second edge of the signal trace;
a second ground via plane below the second ground trace, the second ground via plane extending substantially along a length of the second ground trace;
a buildup layer over the core; and
a second signal trace over the buildup layer and directly above the first ground trace.