| CPC H01L 23/49541 (2013.01) [H01L 21/4828 (2013.01); H01L 21/561 (2013.01); H01L 23/49548 (2013.01); H01L 23/49575 (2013.01); H01L 23/49582 (2013.01); H01L 24/48 (2013.01); H01L 24/49 (2013.01); H01L 24/97 (2013.01); H01L 21/568 (2013.01); H01L 23/3107 (2013.01); H01L 24/85 (2013.01); H01L 2224/05014 (2013.01); H01L 2224/05553 (2013.01); H01L 2224/05554 (2013.01); H01L 2224/45124 (2013.01); H01L 2224/45139 (2013.01); H01L 2224/45144 (2013.01); H01L 2224/45147 (2013.01); H01L 2224/48091 (2013.01); H01L 2224/48106 (2013.01); H01L 2224/48157 (2013.01); H01L 2224/48247 (2013.01); H01L 2224/48464 (2013.01); H01L 2224/49171 (2013.01); H01L 2224/97 (2013.01); H01L 2924/00014 (2013.01); H01L 2924/13091 (2013.01); H01L 2924/17747 (2013.01); H01L 2924/181 (2013.01); H01L 2924/19107 (2013.01)] | 13 Claims |

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1. A semiconductor device, comprising:
a first semiconductor die, a second semiconductor die, a third semiconductor die, and a fourth semiconductor die;
a first plurality of contacts adjacent to the first semiconductor die, a second plurality of contacts adjacent to the second semiconductor die, a third plurality of contacts adjacent to the third semiconductor die, and a fourth plurality of contacts adjacent to the fourth semiconductor die;
a first plurality of tie bars adjacent to the first semiconductor die, a second plurality of tie bars adjacent to the second semiconductor die, a third plurality of tie bars adjacent to the third semiconductor die, and a fourth plurality of tie bars adjacent to the fourth semiconductor die;
an encapsulant coupled at least partially over each of the semiconductor die and each of the plurality of contacts; and
a first trench in a first surface of the encapsulant laterally adjacent to each of the plurality of contacts;
wherein a depth of the first trench extends across a full vertical thickness of at least two contacts within each of the plurality of contacts;
wherein, the first trench extends only partially into a thickness of the encapsulant;
wherein the first plurality of contacts and the second plurality of contacts are exposed on a first sidewall of the first trench and the third plurality of contacts and the fourth plurality of contacts are exposed on a second sidewall of the first trench; and
wherein the first plurality of contacts is opposite the fourth plurality of contacts and the second plurality of contacts is opposite the third plurality of contacts.
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