US 12,424,472 B2
Substrate storing container
Tsuyoshi Nagashima, Tokyo (JP); and Ryuuji Fukuda, Tokyo (JP)
Assigned to MIRAIAL CO., LTD., Tokyo (JP)
Appl. No. 18/551,473
Filed by Miraial Co. Ltd., Tokyo (JP)
PCT Filed Mar. 29, 2021, PCT No. PCT/JP2021/013258
§ 371(c)(1), (2) Date Sep. 20, 2023,
PCT Pub. No. WO2022/208602, PCT Pub. Date Oct. 6, 2022.
Prior Publication US 2024/0162069 A1, May 16, 2024
Int. Cl. H01L 21/673 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01)
CPC H01L 21/67393 (2013.01) [H01L 21/6732 (2013.01); H01L 21/67383 (2013.01); H01L 21/67772 (2013.01); H01L 21/67389 (2013.01)] 5 Claims
OG exemplary drawing
 
1. A substrate storing container, comprising:
a container body having a container body opening at one end, and a wall with a closed tubular shape at another end, the container body comprising a substrate storing space defined by an inner surface of the wall, wherein the substrate storing space is capable of storing a plurality of substrates and communicates with the container body opening;
a lid detachably attachable to the container body opening, and capable of closing the container body opening;
back-side substrate supports arranged in the substrate storing space, the back-side substrate supports being capable of supporting edge portions of the plurality of substrates and configured to support the plurality of substrates such that the edge portions of the plurality of substrates are arranged in parallel in a state where the container body opening is closed by the lid;
lateral-side substrate supports arranged to form counterparts to each other in a lateral direction in the substrate storing space, the lateral-side substrate supports being capable of supporting edge portions of the plurality of substrates when in contact with the edge portions of the plurality of substrates such that the substrates adjacent to each other are arranged in parallel at predetermined intervals; and
a support-forming member configured to be disposed to face an inner surface of a side wall belonging to the wall of the container body, wherein
the lateral-side substrate supports are provided on the support-forming member, and
a dehumidifying agent is removably disposed between the support-forming member and the inner surface of the side wall belonging to the wall of the container body and is accessible from the container body opening.