US 12,424,464 B2
Radiation shield
Melvin Verbaas, Scottsdale, AZ (US)
Assigned to ASM IP Holding B.V., Almere (NL)
Filed by ASM IP Holding B.V., Almere (NL)
Filed on Aug. 3, 2022, as Appl. No. 17/880,412.
Application 16/872,045 is a division of application No. 15/672,119, filed on Aug. 8, 2017, granted, now 10,692,741, issued on Jun. 23, 2020.
Application 17/880,412 is a continuation of application No. 16/872,045, filed on May 11, 2020, granted, now 11,417,545.
Prior Publication US 2022/0375772 A1, Nov. 24, 2022
Int. Cl. H01L 21/67 (2006.01); C23C 16/458 (2006.01); C23C 16/48 (2006.01); H01L 21/687 (2006.01); H01J 37/32 (2006.01)
CPC H01L 21/67115 (2013.01) [C23C 16/4586 (2013.01); C23C 16/481 (2013.01); C23C 16/488 (2013.01); H01L 21/67017 (2013.01); H01L 21/67103 (2013.01); H01L 21/67161 (2013.01); H01L 21/6719 (2013.01); H01L 21/67248 (2013.01); H01L 21/68735 (2013.01); H01L 21/68785 (2013.01); H01J 37/32449 (2013.01)] 17 Claims
OG exemplary drawing
 
1. An apparatus for supporting a substrate during a reaction process, the apparatus comprising:
a susceptor heater assembly comprising a substrate support surface, a base, and a side surface; and
a radiation shield coupled to the susceptor heater assembly, wherein the radiation shield is positioned opposite the substrate support surface proximate to a bottom surface of the base, wherein the radiation shield comprises a plate having an outer diameter and an inner diameter, and wherein the plate is coupled to the side surface of the susceptor heater assembly at the outer diameter and is spaced apart a distance at the inner diameter from a movable pedestal adapted to vertically position the susceptor heater assembly in the reaction chamber.