US 12,424,421 B2
Apparatus and method for controlling a substrate temperature
Naoya Kida, Yokohama (JP); Arata Tatsumi, Yokohama (JP); Kenji Sekiya, Yokohama (JP); Naoya Aikawa, Yokohama (JP); and Masaya Takanashi, Yokohama (JP)
Assigned to NHK SPRING CO., LTD., Yokohama (JP)
Filed by NHK SPRING CO., LTD., Yokohama (JP)
Filed on Feb. 4, 2022, as Appl. No. 17/592,766.
Application 17/592,766 is a continuation of application No. PCT/JP2020/028804, filed on Jul. 28, 2020.
Claims priority of application No. 2019-143756 (JP), filed on Aug. 5, 2019.
Prior Publication US 2022/0157579 A1, May 19, 2022
Int. Cl. H01J 37/32 (2006.01); C23C 14/24 (2006.01); C23C 14/34 (2006.01); C23C 14/50 (2006.01); C23C 16/44 (2006.01); C23C 16/458 (2006.01); C23C 16/46 (2006.01); H05B 1/02 (2006.01); H05B 3/28 (2006.01); H01L 21/683 (2006.01)
CPC H01J 37/32724 (2013.01) [C23C 14/24 (2013.01); C23C 14/34 (2013.01); C23C 14/50 (2013.01); C23C 16/4412 (2013.01); C23C 16/4586 (2013.01); C23C 16/46 (2013.01); H05B 1/0233 (2013.01); H05B 3/283 (2013.01); H01J 2237/334 (2013.01); H01L 21/6833 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A stage comprising:
a shaft;
a first supporting plate over the shaft;
a heater arranged in a trench formed in the first supporting plate; and
a gas-supplying tube arranged in the shaft and configured to blow a gas to the first supporting plate,
wherein a tip of the gas-supplying tube is spaced in an extending direction of the gas-supplying tube from an end of the shaft over which the first supporting plate is positioned, and is located under the end of the shaft.