| CPC G11C 17/126 (2013.01) [G11C 7/18 (2013.01)] | 20 Claims |

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1. A device comprising:
a bitcell having a bitcell layout with a first metal layer, a second metal layer and a via programming layer; and
a via marking layer provided in the bitcell layout for the bitcell, wherein:
the via marking layer defines one or more possible positions of a programming via; and
optical proximity correction (OPC) for the first metal layer and the second metal layer is performed based on the defined one or more possible positions.
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