US 12,423,639 B2
Diagnostic tool to tool matching methods for manufacturing equipment
Sejune Cheon, Seoul (KR); Jeong Jin Hong, Yongin (KR); Mikyung Shim, Seongnam (KR); Xiaoqun Zou, Danville, CA (US); Jinkyeong Lee, Seoul (KR); and Sang Hong Kim, Seoul (KR)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Apr. 12, 2024, as Appl. No. 18/634,705.
Application 18/634,705 is a continuation of application No. 17/586,700, filed on Jan. 27, 2022, granted, now 11,961,030.
Prior Publication US 2024/0273443 A1, Aug. 15, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. G06Q 10/0639 (2023.01); G06N 3/084 (2023.01); G06Q 50/04 (2012.01)
CPC G06Q 10/0639 (2013.01) [G06N 3/084 (2013.01); G06Q 50/04 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method, comprising:
receiving, by a processing device, trace sensor data associated with a first manufacturing process of a manufacturing chamber;
processing the trace sensor data by the processing device to generate summary data associated with the trace sensor data, generating the summary data comprising:
identifying a steady state portion of the trace sensor data,
identifying a transient portion of the trace sensor data,
generating a first portion of the summary data based on the steady state portion, and
generating a second portion of the summary data based on the transient portion;
generating a quality index score based on the summary data; and
causing, by the processing device, a corrective action to be implemented in view of the quality index score.