US 12,422,673 B2
Multi-DOF moving stage and display apparatus including the same
Jangwoo You, Seoul (KR); Kyujin Cho, Seoul (KR); Changkun Lee, Seoul (KR); Hongseok Lee, Seoul (KR); Jesung Koh, Suwon-si (KR); Yongmin Park, Seoul (KR); and Sunpil Jeong, Seoul (KR)
Assigned to SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR); SEOUL NATIONAL UNIVERSITY R&DB FOUNDATION, Seoul (KR); and AJOU UNIVERSITY INDUSTRY-ACADEMIC COOPERATION FOUNDATION, Suwon-si (KR)
Filed by SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR); SEOUL NATIONAL UNIVERSITY R&DB FOUNDATION, Seoul (KR); and AJOU UNIVERSITY INDUSTRY-ACADEMIC COOPERATION FOUNDATION, Suwon-si (KR)
Filed on Nov. 29, 2021, as Appl. No. 17/537,157.
Claims priority of application No. 10-2021-0030393 (KR), filed on Mar. 8, 2021.
Prior Publication US 2022/0283435 A1, Sep. 8, 2022
Int. Cl. G02B 27/01 (2006.01); G02B 30/20 (2020.01)
CPC G02B 27/0149 (2013.01) [G02B 27/0172 (2013.01); G02B 27/0176 (2013.01); G02B 27/0179 (2013.01); G02B 30/20 (2020.01); G02B 2027/0134 (2013.01); G02B 2027/0159 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A multi-degree of freedom (DOF) moving stage comprising:
an end-effector;
three driven links pivotably connected to the end-effector at angular intervals from each other, wherein an interval between a first driven link and a second driven link of the three driven links is 90 degrees, and an interval between the first driven link and a third driven link of the three driven links is 90 degrees;
three driving links pivotably connected to the three driven links, respectively; and
three actuators configured to drive the three driving links, respectively,
wherein each of the three driven links respectively comprises:
a first arm, a second arm, a third arm and a fourth arm arranged at intervals; and
a flexible member that connects the first, second, third and fourth arms to each other in a parallelogram shape across the intervals, that forms pivotable joints at the intervals, and that is pivotably connected to the end-effector,
wherein for each of the three driven links, the first arm is pivotably connected to the end-effector, the third arm facing the first arm is pivotably connected to the respective driving link, and the second arm and the fourth arm have a hollow prism shape,
wherein each of the second arm and the fourth arm comprises a first plate member, a second plate member and a third plate member that are arranged on the flexible member, and
wherein the flexible member comprises a first bendable portion that connects the first plate member and the second plate member, and a second bendable portion that connects the first plate member and the third plate member.