| CPC G02B 27/0149 (2013.01) [G02B 27/0172 (2013.01); G02B 27/0176 (2013.01); G02B 27/0179 (2013.01); G02B 30/20 (2020.01); G02B 2027/0134 (2013.01); G02B 2027/0159 (2013.01)] | 17 Claims |

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1. A multi-degree of freedom (DOF) moving stage comprising:
an end-effector;
three driven links pivotably connected to the end-effector at angular intervals from each other, wherein an interval between a first driven link and a second driven link of the three driven links is 90 degrees, and an interval between the first driven link and a third driven link of the three driven links is 90 degrees;
three driving links pivotably connected to the three driven links, respectively; and
three actuators configured to drive the three driving links, respectively,
wherein each of the three driven links respectively comprises:
a first arm, a second arm, a third arm and a fourth arm arranged at intervals; and
a flexible member that connects the first, second, third and fourth arms to each other in a parallelogram shape across the intervals, that forms pivotable joints at the intervals, and that is pivotably connected to the end-effector,
wherein for each of the three driven links, the first arm is pivotably connected to the end-effector, the third arm facing the first arm is pivotably connected to the respective driving link, and the second arm and the fourth arm have a hollow prism shape,
wherein each of the second arm and the fourth arm comprises a first plate member, a second plate member and a third plate member that are arranged on the flexible member, and
wherein the flexible member comprises a first bendable portion that connects the first plate member and the second plate member, and a second bendable portion that connects the first plate member and the third plate member.
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