US 12,422,619 B2
Fabrication of waveguide structures
Frank Zaugg, Redwood City, CA (US); and Joshua Wayne Parks, Portland, OR (US)
Assigned to Fluxus, Inc., Sunnyvale, CA (US)
Filed by Fluxus, Inc., Sunnyvale, CA (US)
Filed on Nov. 15, 2023, as Appl. No. 18/510,137.
Application 18/510,137 is a continuation of application No. 17/970,804, filed on Oct. 21, 2022, granted, now 11,852,869.
Application 17/970,804 is a continuation of application No. 17/057,508, granted, now 11,480,733, issued on Oct. 25, 2022, previously published as PCT/US2019/033365, filed on May 21, 2019.
Claims priority of provisional application 62/674,853, filed on May 22, 2018.
Prior Publication US 2024/0085629 A1, Mar. 14, 2024
Int. Cl. C03C 15/00 (2006.01); G02B 6/122 (2006.01); G02B 6/136 (2006.01)
CPC G02B 6/136 (2013.01) [C03C 15/00 (2013.01); G02B 6/122 (2013.01)] 22 Claims
OG exemplary drawing
 
1. A method for fabricating a waveguide structure to form at least one solid-core waveguide, the method comprising:
forming one or more apertures in an aperture layer of the waveguide structure;
etching one or more fluid channels into a first oxide layer of the waveguide structure, wherein the one or more fluid channels are adjacent to the one or more apertures, and wherein the one or more apertures are configured to allow light from the one or more fluid channels to pass through the aperture layer; and
affixing a cover layer to the first oxide layer to enclose the one or more fluid channels.