US 12,422,577 B2
Gas detector fabrication method, gas detector, and ray detection device
Zhiyong Zhang, Anhui (CN); Changqing Feng, Anhui (CN); Sicheng Wen, Anhui (CN); Jianbei Liu, Anhui (CN); Ming Shao, Anhui (CN); and Yi Zhou, Anhui (CN)
Assigned to UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA, Hefei (CN)
Appl. No. 18/569,599
Filed by UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA, Anhui (CN)
PCT Filed Jul. 12, 2021, PCT No. PCT/CN2021/105756
§ 371(c)(1), (2) Date Dec. 12, 2023,
PCT Pub. No. WO2022/267105, PCT Pub. Date Dec. 29, 2022.
Claims priority of application No. 202110710500.4 (CN), filed on Jun. 25, 2021.
Prior Publication US 2024/0272316 A1, Aug. 15, 2024
Int. Cl. G01T 1/185 (2006.01); G01T 1/24 (2006.01); G01T 1/29 (2006.01); H05K 1/03 (2006.01); H05K 1/09 (2006.01)
CPC G01T 1/2935 (2013.01) [G01T 1/185 (2013.01); G01T 1/241 (2013.01); H05K 1/0353 (2013.01); H05K 1/095 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A gas detector fabrication method, comprising following steps:
fabricating a signal readout plate, wherein the step of fabricating the signal readout plate comprises fabricating metal readout electrodes on an upper end surface of a lower insulating layer, and covering upper end surfaces of the metal readout electrodes with an upper insulating layer;
pressing the signal readout plate and performing surface processing, wherein the step of pressing the signal readout plate and performing surface processing comprises pressing the signal readout plate on a substrate, and making a side, distant from the substrate, of the upper insulating layer to be a plane;
fabricating a resistive anode electrodes, wherein the step of fabricating the resistive anode electrode comprises fabricating a resistive layer on an upper end surface of the signal readout plate, and fixing a low-resistance electrode ring to a periphery of an upper end surface of the resistive layer; and
fabricating a detector amplification assembly, wherein the step of fabricating the detector amplification assembly comprises fixing a support frame to an upper end of the low-resistance electrode ring, making the support frame to completely cover the low-resistance electrode ring, and fixing a micro-grid electrode to an upper end of the support frame.