US 12,422,457 B2
Probe card
Tzu-Chien Wang, Hsinchu (TW); Wen-Yuan Hsu, Hsinchu (TW); Ming-Hsien Chen, Hsinchu (TW); and Jia-Lin Lu, Hsinchu (TW)
Assigned to HERMES TESTING SOLUTIONS INC., Hsinchu (TW)
Filed by Hermes Testing Solutions Inc., Hsinchu (TW)
Filed on Dec. 19, 2022, as Appl. No. 18/084,256.
Claims priority of application No. 110147649 (TW), filed on Dec. 20, 2021.
Prior Publication US 2023/0194571 A1, Jun. 22, 2023
Int. Cl. G01R 1/073 (2006.01); G01R 1/067 (2006.01)
CPC G01R 1/07364 (2013.01) [G01R 1/06716 (2013.01); G01R 1/07342 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A probe card, comprising:
a probe module, where the probe module comprises a head, a module substrate configured to carry the head, and a conductive connector configured to electrically connect the head and the module substrate;
a card substrate with a through hole;
a cap base on the card substrate;
a module cap connected rotatably with the cap base to cover or uncover the through hole by rotating the module cap, wherein the module cap is substantially planar; and
a pair of lateral L-shaped arms respectively attached to a pair of opposite lateral edges of the module cap, wherein a pair of opposite lateral grooves are formed between the module cap and the pair of lateral L-shaped arms and are configured to slidably accept a pair of lateral edges of the probe module for slidably installing the probe module on the module cap to face the through hole or to slidably pull the pair of lateral edges of the probe module out from the module cap for slidably uninstalling the probe module from the module cap, the module cap carries and fixes the probe module via the pair of opposite lateral grooves, and the head of the probe module passes the thorough hole to protrude from the card substrate when the module cap is closed, and the head of the probe module is pulled back when the module cap is opened.