US 12,422,456 B2
Probe card
Chih-Peng Hsieh, Taoyuan (TW); and Chihmin Yang, Taoyuan (TW)
Assigned to Unimicron Technology Corp., Taoyuan (TW)
Filed by Unimicron Technology Corp., Taoyuan (TW)
Filed on Jan. 8, 2024, as Appl. No. 18/406,231.
Claims priority of application No. 112145556 (TW), filed on Nov. 24, 2023.
Prior Publication US 2025/0172587 A1, May 29, 2025
Int. Cl. G01R 1/073 (2006.01); G01R 1/02 (2006.01); G01R 1/04 (2006.01); G01R 1/067 (2006.01); G01R 31/28 (2006.01)
CPC G01R 1/07342 (2013.01) 10 Claims
OG exemplary drawing
 
1. A probe card, comprising:
an adapter plate;
a guide plate disposed on one side of the adapter plate and comprising a first guide plate portion, a second guide plate portion and a capacitor structure, wherein the second guide plate portion and the first guide plate portion are disposed in a hollow ring shape at intervals, and the capacitor structure is disposed in the second guide plate portion and connected to the second guide plate portion; and
a plurality of probes electrically connected to the adapter plate and comprising at least one first ground prober, at least one second ground prober and a plurality of power probers, the at least one first ground prober penetrating through the first guide plate portion and connected to the capacitor structure and the adapter plate, and the at least one second ground prober and the plurality of power probers penetrating through the first guide plate portion, the capacitor structure and the second guide plate portion and connected to the adapter plate, wherein the at least one first ground prober is used to provide voltage to the capacitor structure to generate a potential difference, and the plurality of power probes draw current through the capacitor structure and form a current loop with the at least one second ground prober.