US 12,422,453 B2
Standard sample and manufacturing method thereof
Akira Kodaira, Tokyo (JP); Takashi Maruyama, Tokyo (JP); and Satoshi Oku, Tokyo (JP)
Assigned to NTT ADVANCED TECHNOLOGY CORPORATION, Tokyo (JP)
Appl. No. 17/998,324
Filed by NTT ADVANCED TECHNOLOGY CORPORATION, Tokyo (JP)
PCT Filed May 14, 2020, PCT No. PCT/JP2020/019260
§ 371(c)(1), (2) Date Nov. 9, 2022,
PCT Pub. No. WO2021/229755, PCT Pub. Date Nov. 18, 2021.
Prior Publication US 2023/0228792 A1, Jul. 20, 2023
Int. Cl. G01Q 40/02 (2010.01)
CPC G01Q 40/02 (2013.01) 12 Claims
OG exemplary drawing
 
1. A standard sample used to evaluate a microscope capable of performing observation in a nanometer size, including a scanning probe microscope, comprising:
a substrate made of a crystal with a main surface that is a (110) plane, the substrate including a recess formed from the main surface of the substrate to an inside of the substrate,
wherein the recess includes a side surface that forms one plane perpendicular to the main surface of the substrate, and
the side surface is a facet surface and is a tilting surface tilted from a (111) plane.