US 12,422,452 B2
Device for measuring air speed
Si-Yu Wen, Miaoli Hsien (TW); Chun-Kai Huang, Miaoli Hsien (TW); and Chun-Chung Chen, Miaoli Hsien (TW)
Assigned to FOXSEMICON INTEGRATED TECHNOLOGY, INC., Miao-Li Hsien (TW)
Filed by FOXSEMICON INTEGRATED TECHNOLOGY, INC., Miao-Li Hsien (TW)
Filed on May 19, 2023, as Appl. No. 18/199,855.
Claims priority of application No. 202210558081.1 (CN), filed on May 19, 2022.
Prior Publication US 2023/0417791 A1, Dec. 28, 2023
Int. Cl. G01F 5/00 (2006.01); G01P 5/00 (2006.01); H01L 21/673 (2006.01)
CPC G01P 5/00 (2013.01) [H01L 21/67389 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A device configured to measure an air speed near an air outlet of an air curtain, the air curtain being mounted near an opening of a wafer box, a plurality of receiving grooves being defined in the wafer box, each of the plurality of receiving grooves being configured to receive a wafer, the device comprising:
one or more fixing members and one or more air speed measuring members, wherein each of the one or more fixing members is configured to be received and held in one of the plurality of receiving grooves, each of the one or more air speed measuring members is arranged on one of the one or more fixing members, each of the one or more air speed measuring members comprises one or more sensors, each of the one or more sensors extends outside the wafer box and is configured to be positioned below the air curtain, each of the one or more sensors is configured to measure the air speed near the air outlet of the air curtain.