US 12,422,421 B2
Low power mixed gas sensor
Leo J. Small, Albuquerque, NM (US); Stephen J. Percival, Albuquerque, NM (US); Tina M. Nenoff, Albuquerque, NM (US); and Mara E. Schindelholz, Columbus, OH (US)
Assigned to National Technology & Engineering Solutions of Sandia, LLC, Albuquerque, NM (US)
Filed by National Technology & Engineering Solutions of Sandia, LLC, Albuquerque, NM (US)
Filed on Jan. 31, 2023, as Appl. No. 18/103,617.
Application 18/103,617 is a continuation in part of application No. 17/173,333, filed on Feb. 11, 2021, granted, now 11,573,217.
Prior Publication US 2023/0168231 A1, Jun. 1, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. G01N 33/00 (2006.01); G01N 27/12 (2006.01); G01N 27/22 (2006.01)
CPC G01N 33/0027 (2013.01) [G01N 27/12 (2013.01); G01N 27/227 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A low power mixed gas sensor, comprising:
an electrically insulating substrate;
a pair of interdigitated electrodes disposed on the substrate;
a mixed-gas-capture film that absorbs two or more target gases in a multi-gas environment, wherein the mixed-gas-capture film comprises a metal-organic framework material disposed on the pair of interdigitated electrodes and the substrate, and wherein the metal-organic framework (MOF) material comprises M-MOF-74, wherein M is cobalt, magnesium, zinc, or nickel, or RE-DOBDC, where RE is a rare-earth element and DOBDC is dihydroxyterephthalic acid; and
a frequency response analyzer configured to measure the impedance response of the mixed-gas-capture film when the two or more target gases are absorbed in the mixed-gas-capture film and an alternating voltage is applied to the pair of interdigitated electrodes.