US 12,422,405 B2
Fine dust mass measurement device and operating method thereof
Ilhwan Kim, Suwon-si (KR); Changhyeon Kim, Suwon-si (KR); and Kangyoon Lee, Seoul (KR)
Assigned to SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR); and RESEARCH & BUSINESS FOUNDATION SUNGKYUNKWAN UNIVERSITY, Suwon-si (KR)
Filed by SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR); and RESEARCH & BUSINESS FOUNDATION SUNGKYUNKWAN UNIVERSITY, Suwon-si (KR)
Filed on Jun. 1, 2023, as Appl. No. 18/204,559.
Claims priority of application No. 10-2022-0171867 (KR), filed on Dec. 9, 2022.
Prior Publication US 2024/0192172 A1, Jun. 13, 2024
Int. Cl. G01N 29/02 (2006.01); G01N 29/44 (2006.01)
CPC G01N 29/022 (2013.01) [G01N 29/4436 (2013.01); G01N 2291/02408 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A dust mass measurement device comprising:
a sensing channel configured to generate a sensing clock signal, the sensing channel comprising a first surface acoustic wave sensor configured to generate a surface acoustic wave and a first amplifier configured to amplify the surface acoustic wave generated by the first surface acoustic wave sensor;
a reference channel configured to generate a reference clock signal, the reference channel comprising a second surface acoustic wave sensor configured to generate a surface acoustic wave and a second amplifier configured to amplify the surface acoustic wave generated by the second surface acoustic wave sensor;
a counter electrically connected to the sensing channel and the reference channel and configured to generate a first output signal based on the sensing clock signal, and generate a second output signal based on the reference clock signal; and
a controller electrically connected to the counter and configured to:
calculate a frequency difference between the sensing clock signal and the reference clock signal based on a difference value between the first output signal and the second output signal; and
measure a mass of particulate matter based on the frequency difference between the sensing clock signal and the reference clock signal.