US 12,422,387 B2
Charged particle optical device, objective lens assembly, detector, detector array, and methods
Marco Jan-Jaco Wieland, Delft (NL); and Albertus Victor Gerardus Mangnus, Eindhoven (NL)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Filed by ASML Netherlands B.V., Veldhoven (NL)
Filed on Oct. 16, 2023, as Appl. No. 18/487,946.
Application 18/487,946 is a continuation of application No. 17/559,950, filed on Dec. 22, 2021, granted, now 11,821,859.
Claims priority of application No. 20216927 (EP), filed on Dec. 23, 2020; application No. 21174518 (EP), filed on May 18, 2021; and application No. 21191729 (EP), filed on Aug. 17, 2021.
Prior Publication US 2024/0044824 A1, Feb. 8, 2024
Int. Cl. G01N 23/2251 (2018.01); G01N 23/203 (2006.01); H01J 37/10 (2006.01); H01J 37/244 (2006.01)
CPC G01N 23/2251 (2013.01) [G01N 23/203 (2013.01); H01J 37/10 (2013.01); H01J 37/244 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A charged particle-optical device configured to project a multi-beam of charged particles along sub-beam paths towards a sample, the multi-beam comprising sub-beams, the charged particle-optical device comprising:
an objective lens array configured to project an array of charged-particle sub-beams onto the sample; and
a detector array configured to capture charged particles emitted from the sample,
wherein the charged particle-optical device is configured to switch between two operation states,
wherein in a first operation state, the detector array is configured to detect more secondary charged particles than backscattered charged particles, and in a second operation state, the detector array is configured to detect more backscattered charged particles than secondary charged particles.