US 12,422,381 B2
Optical inspection method and storage medium, and optical inspection apparatus that uses the same
Hiroshi Ohno, Tokyo (JP); Hideaki Okano, Yokohama Kanagawa (JP); Kenta Takanashi, Kawasaki Kanagawa (JP); Takahiro Kamikawa, Yokohama Kanagawa (JP); and Hiroya Kano, Kawasaki Kanagawa (JP)
Assigned to Kabushiki Kaisha Toshiba, Tokyo (JP)
Filed by KABUSHIKI KAISHA TOSHIBA, Tokyo (JP)
Filed on Oct. 25, 2023, as Appl. No. 18/493,995.
Claims priority of application No. 2023-045841 (JP), filed on Mar. 22, 2023.
Prior Publication US 2024/0319111 A1, Sep. 26, 2024
Int. Cl. G01N 21/956 (2006.01); G01N 21/88 (2006.01)
CPC G01N 21/95607 (2013.01) [G01N 21/8806 (2013.01); G01N 21/8851 (2013.01); G01N 2021/8825 (2013.01)] 14 Claims
OG exemplary drawing
 
1. An optical inspection method comprising:
projecting first pattern light in a first basic modulation mode that periodically changes in bright and dark, onto an object;
acquiring a first image by capturing an image of the object onto which the first pattern light has been projected;
projecting second pattern light in a first inverted modulation mode in which bright and dark are inverted with respect to the first basic modulation mode, onto the object;
acquiring a second image by capturing an image of the object onto which the second pattern light has been projected; and
generating a singular light-scattered image in which a singular region including uniquely-scattered light that is extracted based at least on the first image and the second image is intensified.