| CPC C30B 15/00 (2013.01) [C30B 29/06 (2013.01)] | 20 Claims |

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1. An anti-cracking suction device for single crystal growth by a Czochralski method, comprising:
an outer cylinder;
an inner cylinder disposed in the outer cylinder;
a suction tube; wherein an upper portion of the suction tube extends into the inner cylinder from a bottom of the outer cylinder, and a lower portion of the suction tube is disposed outside the outer cylinder; and
a first gap provided between a bottom of the inner cylinder and the outer cylinder;
wherein the first gap is configured to cushion a thermal expansion of the bottom of the inner cylinder to reduce a stress at where the suction tube is connected with the inner cylinder, in a case that silicon liquid is sucked into the inner cylinder by the suction tube and is accumulated at the bottom of the inner cylinder; and
wherein the anti-cracking suction device further comprises a tray disposed in the first gap, a bottom of the tray is disposed against the bottom of the outer cylinder, the tray comprises an inner plate and an outer plate externally connected to the inner plate, a surface of the inner plate on a side away from the bottom of the outer cylinder is disposed against the bottom of the inner cylinder, a surface of the outer plate on a side away from the bottom of the outer cylinder is spaced apart from the bottom of the inner cylinder, and a thickness of the outer plate gradually increases along a direction toward the suction tube.
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