US 12,421,606 B2
Gas distribution assembly including positioning device
Wei Chen Liao, Hachioji (JP); and Vincent Hubert Bernard Gilles Babin, Tama (JP)
Assigned to ASM IP Holding B.V., Almere (NL)
Filed by ASM IP Holding B.V., Almere (NL)
Filed on Aug. 29, 2022, as Appl. No. 17/897,827.
Claims priority of provisional application 63/239,835, filed on Sep. 1, 2021.
Prior Publication US 2023/0069637 A1, Mar. 2, 2023
Int. Cl. C23C 16/40 (2006.01); C23C 16/455 (2006.01); F16B 1/00 (2006.01)
CPC C23C 16/45565 (2013.01) [F16B 1/00 (2013.01); C23C 16/45525 (2013.01); F16B 2200/99 (2023.08)] 20 Claims
OG exemplary drawing
 
1. A gas distribution assembly for distributing a gas to a reaction chamber comprising:
an exhaust duct comprising an outer surface and a top surface;
a shower plate comprising a rim, wherein the rim comprises an outer surface and a bottom surface, and wherein the bottom surface of the rim is adjacent to the top surface of the exhaust duct; and
five or more positioning devices connected to the exhaust duct adjacent to the outer surface of the rim,
wherein the positioning devices are configured to reduce misalignment between the shower plate and the exhaust duct.