US 12,421,259 B2
Titanium complex, method for producing same, and method for producing titanium-containing thin film
Shuya Ikemura, Ayase (JP); Hiroyuki Oike, Ayase (JP); Yuki Yamamoto, Ayase (JP); and Teppei Hayakawa, Ayase (JP)
Assigned to TOSOH CORPORATION, Yamaguchi (JP)
Appl. No. 18/014,419
Filed by TOSOH CORPORATION, Yamaguchi (JP)
PCT Filed Jul. 8, 2021, PCT No. PCT/JP2021/025724
§ 371(c)(1), (2) Date Jan. 4, 2023,
PCT Pub. No. WO2022/009945, PCT Pub. Date Jan. 13, 2022.
Claims priority of application No. 2020-117772 (JP), filed on Jul. 8, 2020.
Prior Publication US 2023/0257404 A1, Aug. 17, 2023
Int. Cl. C07F 7/28 (2006.01); C01B 21/076 (2006.01); C23C 16/34 (2006.01); H01L 21/285 (2006.01)
CPC C07F 7/28 (2013.01) [C01B 21/0766 (2013.01); C23C 16/34 (2013.01); H01L 21/28568 (2013.01)] 9 Claims
 
1. A titanium complex represented by the general formula (1):

OG Complex Work Unit Chemistry
wherein each of R1 and R2 is independently a C1-6 alkyl group which may be bonded with each other to form a ring, X is CR3 or a N atom, Y is CR4 or a N atom, Z is CR5 or a N atom, each of R3, R4 and R5 is independently a hydrogen atom or a C1-6 alkyl group, and n is an integer of from 1 to 3.