US 12,421,155 B2
Methods for adjusting beam properties for laser processing coated substrates
Alejandro Antonio Becker, Stockdorf (DE); Benjamin Paul Foerg, Munich (DE); Tobias Christian Roeder, Munich (DE); and Uwe Stute, Neustadt am Rübenberge (DE)
Assigned to CORNING INCORPORATED, Corning, NY (US)
Filed by CORNING INCORPORATED, Corning, NY (US)
Filed on Sep. 17, 2021, as Appl. No. 17/477,940.
Claims priority of provisional application 63/084,050, filed on Sep. 28, 2020.
Prior Publication US 2022/0098082 A1, Mar. 31, 2022
Int. Cl. C03B 33/07 (2006.01); B23K 26/362 (2014.01); B23K 26/402 (2014.01); C03B 33/02 (2006.01)
CPC C03B 33/074 (2013.01) [B23K 26/362 (2013.01); B23K 26/402 (2013.01); C03B 33/0222 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A method of laser processing a coated substrate, the method comprising:
determining an optical characteristic for a coating layer of the coated substrate, wherein the coated substrate comprises the coating layer disposed on a transparent workpiece;
selecting a beam path for a pulsed laser beam based on the optical characteristic, wherein the beam path is selected from at least one of a plurality of beam paths comprising:
a polarization-adjusting beam path through which a polarization of the pulsed laser beam is adjusted; and
a frequency-adjusting beam path through which a frequency of the pulsed laser beam is adjusted;
directing the pulsed laser beam down the selected beam path to form a modified pulsed laser beam; and
forming a defect in the transparent workpiece by directing the modified pulsed laser beam into the transparent workpiece, wherein:
the modified pulsed laser beam forms a laser beam focal line in the transparent workpiece, the laser beam focal line inducing absorption in the transparent workpiece, the induced absorption producing the defect in the transparent workpiece; and
the laser beam focal line formed from the modified pulsed laser beam comprises:
a wavelength λ;
a spot size wo; and
a Rayleigh range ZR that is greater than FDπwo2/λ, where FD is a dimensionless divergence factor.