US 12,420,315 B2
Gas delivery pallet assembly, cleaning unit and chemical mechanical polishing system having the same
Edwin Velazquez, Union City, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Oct. 20, 2022, as Appl. No. 17/970,434.
Prior Publication US 2024/0131562 A1, Apr. 25, 2024
Prior Publication US 2024/0226970 A9, Jul. 11, 2024
Int. Cl. B08B 5/02 (2006.01); B24B 37/30 (2012.01); B24B 53/017 (2012.01)
CPC B08B 5/02 (2013.01) [B24B 37/30 (2013.01); B24B 53/017 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A gas pallet assembly comprising:
a first mounting plate;
a first primary gas conduit secured to the first mounting plate, the first primary gas conduit comprising:
a first inlet port;
a first normally closed valve;
a first regulator coupled between the first normally closed valve and the first inlet port;
a first outlet port;
a first filter coupled to the first outlet port; and
a first flow controller coupled between the first filter and the first normally closed valve; and
a second primary gas conduit secured to the first mounting plate, the second primary gas conduit comprising:
a second inlet port;
a second normally closed valve;
a second regulator coupled between the second normally closed valve and the second inlet port;
a second outlet port;
a second filter coupled to the second outlet port;
a second flow controller coupled between the second filter and the second normally closed valve;
a third normally closed valve coupled to a tee disposed between the second regulator and the second normally closed valve;
a third outlet port;
a third filter coupled to the third outlet port; and
a third flow controller coupled between the second filter and the second normally closed valve.