US 12,094,977 B2
Display device
Ji Hye Han, Seoul (KR); Jung Yun Jo, Namyangju-si (KR); and Chul Min Bae, Hwaseong-si (KR)
Assigned to SAMSUNG DISPLAY CO., LTD., Yongin-si (KR)
Filed by Samsung Display Co., LTD., Yongin-si (KR)
Filed on Feb. 14, 2023, as Appl. No. 18/109,301.
Application 18/109,301 is a continuation of application No. 17/149,164, filed on Jan. 14, 2021, granted, now 11,588,053.
Claims priority of application No. 10-2020-0056279 (KR), filed on May 12, 2020.
Prior Publication US 2023/0197853 A1, Jun. 22, 2023
Int. Cl. H01L 27/12 (2006.01); H01L 29/786 (2006.01); H10K 59/121 (2023.01)
CPC H01L 29/78606 (2013.01) [H01L 27/1225 (2013.01); H10K 59/1213 (2023.02)] 24 Claims
OG exemplary drawing
 
1. A display device comprising:
a first buffer film including silicon nitride (SiNx) and disposed on a substrate;
a second buffer film including silicon nitride (SiNx) and disposed on the first buffer film;
a third buffer film including silicon oxide (SiOx) and disposed on the second buffer film; and
a semiconductor pattern including an oxide semiconductor and disposed on the third buffer film, and
wherein a density of the first buffer film is greater than a density of the second buffer film.