US 12,094,705 B2
Substrate treating method and substrate treating apparatus
Jin Woo Jung, Chungcheongnam-do (KR); and Myung Seok Cha, Seoul (KR)
Assigned to SEMES CO., LTD., Chungcheongnam-Do (KR)
Filed by SEMES CO., LTD., Chungcheongnam-do (KR)
Filed on Aug. 22, 2022, as Appl. No. 17/892,214.
Claims priority of application No. 10-2021-0121482 (KR), filed on Sep. 13, 2021.
Prior Publication US 2023/0081833 A1, Mar. 16, 2023
Int. Cl. H01L 21/02 (2006.01); H01L 21/67 (2006.01)
CPC H01L 21/02101 (2013.01) [H01L 21/67034 (2013.01); H01L 21/67057 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A substrate treating apparatus, comprising:
a chamber having a treatment space treating a substrate; and
a treatment fluid supply unit supplying a treatment fluid to the treatment space,
wherein the treatment fluid supply unit includes:
a supply tank in which the treatment fluid is stored;
a treatment fluid supply line connecting the supply tank and the chamber and supplying the treatment fluid from the supply tank to the chamber;
a first component installed in the treatment fluid supply line, wherein the first component includes a valve;
a second component installed in the treatment fluid supply line; and
a detection member detecting whether or not metal particles are released from at least one of the first component or the second component, and
the detection member includes:
an upstream detection port connected to the treatment fluid supply line upstream from the first component;
a first downstream detection port connected to the treatment fluid supply line between the first component and the second component;
a second downstream detection port connected to the treatment fluid supply line downstream of the second component; and
an inspecting device provided to be coupled to a selected detection port between the upstream detection port, the first downstream detection port, and the second downstream detection port, and detecting metal particles generated by the first component from the treatment fluid flowing through the selected detection port from the treatment fluid supply line, wherein the inspecting device consists of a measuring unit, a single inlet line, and a single coupling port,
wherein no other component is provided between the upstream detection port and the first component, between the first component and the first downstream detection port, between the first downstream detection port and the second component, and between the second component and the second downstream detection port,
wherein the single inlet line is detachably connected to the upstream detection port, the first downstream detection port or the second downstream detection port by the coupling port, and
each of the upstream detection port, the first downstream detection port and the second downstream detection port has a cap blocking an end thereof in a state in which the inspecting device is separated.