US 12,094,692 B2
Focus ring and apparatus for processing a substrate including a focus ring
Jinhyeok Kim, Pohang-si (KR); Dongmok Lee, Cheonan-si (KR); Yeonghun Wi, Busan (KR); Yonghyun Ham, Bucheon-si (KR); and Yeonggyo Jeong, Anyang-si (KR)
Assigned to Semes Co., Ltd., Cheonan-si (KR)
Filed by Semes Co., Ltd., Cheonan-si (KR)
Filed on Nov. 18, 2021, as Appl. No. 17/455,501.
Claims priority of application No. 10-2020-0181873 (KR), filed on Dec. 23, 2020.
Prior Publication US 2022/0199375 A1, Jun. 23, 2022
Int. Cl. H01J 37/32 (2006.01)
CPC H01J 37/32642 (2013.01) [H01J 2237/334 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A focus ring comprising:
a first ring contacting a substrate;
a second ring coupled to the first ring;
a third ring coupled to the second ring; and
a stepped structure provided between the second ring and the third ring, wherein the stepped structure is downwardly disposed towards the substrate and includes a plurality of stepped portions including a first stepped portion, a second stepped portion, a third stepped portion and a fourth stepped portion, which are downwardly disposed toward the substrate, and wherein the first to the fourth stepped portions have depths increased toward the substrate and widths decreased toward the substrate, respectively.