US 12,094,621 B2
System comprising an aperture and a dispersing element for applying electromagnetic radiation onto a source material, and method for aligning an aperture
Wolfgang Braun, Bietigheim-Biss (DE); and Robin Wanke, Stuttgart (DE)
Assigned to Max-Planck-Gesellschaft, Zur Förderung Der Wissenschaften E.V., Munich (DE)
Appl. No. 17/642,015
Filed by MAX-PLANCK-GESELLSCHAFT ZUR FÖRDERUNG DER WISSENSCHAFTEN E.V., Munich (DE)
PCT Filed Sep. 11, 2019, PCT No. PCT/EP2019/074253
§ 371(c)(1), (2) Date Mar. 10, 2022,
PCT Pub. No. WO2021/047773, PCT Pub. Date Mar. 18, 2021.
Prior Publication US 2024/0047092 A1, Feb. 8, 2024
Int. Cl. G21K 1/02 (2006.01); G21K 1/04 (2006.01); G21K 1/06 (2006.01)
CPC G21K 1/02 (2013.01) [G21K 1/043 (2013.01); G21K 1/046 (2013.01); G21K 1/067 (2013.01)] 25 Claims
OG exemplary drawing
 
1. An aperture for an electromagnetic radiation, the aperture comprising:
an aperture body consists of a body material transparent for the electromagnetic radiation, the aperture body limited with respect to an impinging direction of the electromagnetic radiation by a facing surface facing the electromagnetic radiation and an averted surface opposite to the facing surface, wherein the aperture body comprises an aperture opening continuously extending between a facing orifice in the facing surface and an averted orifice in the averted surface, and wherein the facing orifice is surrounded by a refraction section, the refraction section being inclined inward with respect to the facing surface into the aperture body by an angle α with respect to the impinging direction, and wherein the averted orifice is surrounded by a reflection section, the reflection section being inclined inward with respect to the averted surface into the aperture body by an angle β with respect to the impinging direction,
wherein the angle α and the angle β are adapted such that an electromagnetic radiation refracted into the aperture body through the refraction section is internally totally reflected on the reflection section.