US 12,092,814 B2
Correcting aberration and apodization of an optical system using correction plates
Haifeng Huang, Livermore, CA (US); Rui-Fang Shi, Cupertino, CA (US); Joseph Walsh, Soquel, CA (US); Mitchell Lindsay, Livermore, CA (US); and Eric Vella, Mountain View, CA (US)
Assigned to KLA Corporation, Milpitas, CA (US)
Filed by KLA Corporation, Milpitas, CA (US)
Filed on Jan. 12, 2022, as Appl. No. 17/574,157.
Claims priority of provisional application 63/144,996, filed on Feb. 3, 2021.
Prior Publication US 2022/0244530 A1, Aug. 4, 2022
Int. Cl. G02B 27/00 (2006.01); G02B 27/58 (2006.01)
CPC G02B 27/0068 (2013.01) [G02B 27/58 (2013.01)] 38 Claims
OG exemplary drawing
 
1. An optical system with aberration correction, the optical system comprising:
an illumination source;
a detector;
one or more collection optics configured to image a sample onto the detector based on illumination from the illumination source; and
two or more aberration correction plates located in one or more pupil planes of the one or more collection optics and providing at least partial correction of two or more linearly-independent aberration terms, wherein any particular one of the two or more aberration correction plates has a spatially-varying thickness profile providing a selected amount of correction for a single particular aberration term of the two or more linearly-independent aberration terms.