US 12,092,659 B2
Safety system for needle probe card for high-voltage and high-current test on power semiconductor devices, related test machine and corresponding testing method
Marco Marcinno′, Cirie′ (IT); and Carlo Cianferotti, Piombino (IT)
Assigned to CREA COLLAUDI ELETTRONICI AUTOMATIZZATI S.R.L., Cirie' (IT)
Appl. No. 17/762,762
Filed by CREA COLLAUDI ELETTRONICI AUTOMATIZZATI S.R.L., Cirie′ (IT)
PCT Filed May 27, 2021, PCT No. PCT/IB2021/054645
§ 371(c)(1), (2) Date Mar. 23, 2022,
PCT Pub. No. WO2021/240431, PCT Pub. Date Dec. 2, 2021.
Claims priority of application No. 102020000012556 (IT), filed on May 27, 2020.
Prior Publication US 2023/0071495 A1, Mar. 9, 2023
Int. Cl. G01R 1/06 (2006.01); G01R 1/067 (2006.01); G01R 1/073 (2006.01)
CPC G01R 1/06794 (2013.01) [G01R 1/07385 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A safety system for a needle probe card for test machines for high-voltage and high-current testing of power semiconductor electronic devices;
said needle probe card comprising a plurality of needles adapted to be placed in contact with a device under test (DUT), each needle of said plurality of needles being configured to allow a flow of an electric current;
said safety system comprising:
a control unit capable of determining the electric current flowing in every single needle;
a plurality of switching devices configured to selectively interrupt the electric current flowing in said needles;
at least one switching device of the plurality of switching devices being associated with each needle of said needle probe card;
said control unit being configured to drive every single switching device to selectively interrupt the flow of the electric current in a corresponding needle.