CPC G01N 21/95 (2013.01) [G01N 2021/9511 (2013.01)] | 17 Claims |
1. A method for processing defect information of a product, the product comprising a plurality of film layers, and the method comprising:
acquiring defect information on a current film layer and defect information on historical film layers, where the historical film layers were formed before formation of the current film layer;
determining a target location in the current film layer for the defect information, and determining whether defect information exists for a corresponding location to the target location in any of the historical film layers;
if defect information exists for the target location in at least one of the historical film layers, deleting the defect information detected at the target location in the current film layer; and
if no defect information exists for the target location in any of the historical film layers, retaining the defect information detected at the target location in the current film layer;
wherein the method further comprising:
storing recorded defect information in a first data table;
aggregating data in the first data table according to information on processing procedures in a manufacturing process so as to obtain a second data table; and
retrieving data in the second data table according to a received query instruction.
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