US 12,092,533 B2
Sensor, strain detection sensor, pressure sensor, and microphone
Masashi Kubota, Nagaokakyo (JP); Ville Kaajakari, Nagaokakyo (JP); and Masaki Takeuchi, Nagaokakyo (JP)
Assigned to MURATA MANUFACTURING CO., LTD., Kyoto (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Feb. 11, 2022, as Appl. No. 17/669,402.
Application 17/669,402 is a continuation of application No. PCT/JP2020/035465, filed on Sep. 18, 2020.
Claims priority of application No. 2019-192058 (JP), filed on Oct. 21, 2019.
Prior Publication US 2022/0163410 A1, May 26, 2022
Int. Cl. G01L 1/12 (2006.01); G01L 9/16 (2006.01); H04R 15/00 (2006.01)
CPC G01L 1/12 (2013.01) [G01L 9/16 (2013.01); H04R 15/00 (2013.01)] 22 Claims
OG exemplary drawing
 
1. A sensor comprising:
a film portion that is deformable by external force;
a support body supporting the film portion; and
a magnetoresistive element portion on the film portion and including at least one unit element; wherein
the at least one unit element includes a first magnetic layer whose magnetization direction changes in accordance with deformation of the film portion, a second magnetic layer whose magnetization direction is fixed, and an intermediate layer between the first magnetic layer and the second magnetic layer;
the film portion includes a first side portion in a portion of an outer edge of the film portion;
a slit portion is provided in the film portion and includes at least a portion that extends in a direction along the outer edge of the film portion along the first side portion, so that the film portion includes a connection portion in which the first side portion is partially connected to the support body; and
the magnetoresistive element portion is in the connection portion.