US 12,092,520 B2
Broadband pulsed light source apparatus
Takuma Yokoyama, Tokyo (JP)
Assigned to Ushio Denki Kabushiki Kaisha, Tokyo (JP)
Appl. No. 17/598,731
Filed by Ushio Denki Kabushiki Kaisha, Tokyo (JP)
PCT Filed Mar. 25, 2020, PCT No. PCT/JP2020/013501
§ 371(c)(1), (2) Date Sep. 27, 2021,
PCT Pub. No. WO2020/196692, PCT Pub. Date Oct. 1, 2020.
Claims priority of application No. 2019-062009 (JP), filed on Mar. 27, 2019; and application No. 2019-062010 (JP), filed on Mar. 27, 2019.
Prior Publication US 2022/0187126 A1, Jun. 16, 2022
Int. Cl. G01J 3/10 (2006.01); G01N 21/27 (2006.01); G02B 27/09 (2006.01); G02B 27/10 (2006.01)
CPC G01J 3/10 (2013.01) [G01N 21/27 (2013.01); G02B 27/0905 (2013.01); G02B 27/1013 (2013.01); G01N 2201/061 (2013.01); G01N 2201/068 (2013.01); G01N 2201/08 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A broadband pulsed light source apparatus comprising:
a broadband pulsed light source; and
a stretching fiber module structured to stretch a pulse width of broadband pulsed light from the broadband pulsed light source such that an elapsed time and a wavelength of light in a pulse have a one-to-one relationship,
wherein the stretching fiber module includes:
a dividing element structured to spatially divide the broadband pulsed light from the broadband pulsed light source into two beams according to a wavelength range; and
two stretching fibers having different wavelength dispersion characteristics per unit length,
wherein an incident end of each of the two stretching fibers is disposed at a position where a corresponding one of the two beams having a corresponding wavelength range is incident,
wherein each of the two stretching fibers has a wavelength dispersion characteristic and a length such that two beams of stretched pulsed light are emitted from the two stretching fibers, and the two beams of the stretched pulsed light do not temporally completely overlap with each other, and
wherein the two stretching fibers have dispersion characteristics in which a/b is 2 or less, where a is a largest slope of wavelength to time and b is a smallest slope of wavelength to time in an entire wavelength band of the stretched broadband pulsed light.