US 12,091,740 B2
Mask sheet and method of manufacturing the same, opening mask and method of using the same, thin film deposition device and display apparatus
Ge Wang, Beijing (CN); and Zhiliang Jiang, Beijing (CN)
Assigned to CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD., Sichuan (CN); and BOE TECHNOLOGY GROUP CO., LTD., Beijing (CN)
Appl. No. 17/271,374
Filed by CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD., Sichuan (CN); and BOE TECHNOLOGY GROUP CO., LTD., Beijing (CN)
PCT Filed Jul. 24, 2020, PCT No. PCT/CN2020/104531
§ 371(c)(1), (2) Date Feb. 25, 2021,
PCT Pub. No. WO2021/013252, PCT Pub. Date Jan. 28, 2021.
Claims priority of application No. 201910671434.7 (CN), filed on Jul. 24, 2019.
Prior Publication US 2021/0246548 A1, Aug. 12, 2021
Int. Cl. C23C 16/04 (2006.01); C23C 14/04 (2006.01); G03F 1/80 (2012.01); H10K 71/16 (2023.01)
CPC C23C 14/042 (2013.01) [C23C 16/042 (2013.01); H10K 71/166 (2023.02)] 15 Claims
OG exemplary drawing
 
1. A mask sheet having a first side face and a second side face that are substantially parallel to each other and arranged oppositely, the first side face being perpendicular to a thickness direction of the mask sheet; the mask sheet comprising:
at least one opening portion, each opening portion including a first opening extending from the first side face toward the second side face and a second opening extending from the second side face toward the first side face, and the first opening and the second opening being communicated with each other, and an inner border of the second opening being located within an outer border of the first opening in a direction perpendicular to a circumferential direction of the second opening; and
at least one groove located on a periphery of the second opening, the at least one groove being formed in the second side face of the mask sheet, and an orthographic projection of the at least one groove on the first side face being partially overlapped with an orthographic projection of the first opening on the first side face, wherein each groove is arranged continuously around the second opening to form a completely closed ring.