US 12,090,670 B2
Transfer robot and robot system
Osamu Harada, Kitakyushu (JP); Toshiyuki Harada, Kitakyushu (JP); and Kentaro Yotsuji, Kitakyushu (JP)
Assigned to KABUSHIKI KAISHA YASKAWA DENKI, Kitakyushu (JP)
Filed by KABUSHIKI KAISHA YASKAWA DENKI, Kitakyushu (JP)
Filed on Sep. 15, 2021, as Appl. No. 17/475,350.
Application 17/475,350 is a continuation of application No. 16/435,565, filed on Jun. 10, 2019, granted, now 11,167,419.
Claims priority of application No. 2018-133294 (JP), filed on Jul. 13, 2018.
Prior Publication US 2022/0001541 A1, Jan. 6, 2022
Int. Cl. B25J 9/16 (2006.01); B25J 9/00 (2006.01); B25J 9/06 (2006.01); B25J 18/04 (2006.01); H01L 21/677 (2006.01); H01L 21/687 (2006.01)
CPC B25J 9/1682 (2013.01) [B25J 9/0087 (2013.01); B25J 9/009 (2013.01); B25J 9/06 (2013.01); B25J 18/04 (2013.01); H01L 21/67742 (2013.01); H01L 21/68707 (2013.01)] 29 Claims
OG exemplary drawing
 
1. A transfer robot comprising:
a main body;
one arm connected to the main body rotatably around a first axis;
another arm connected to the one arm via a shaft such that the another arm is rotatable relatively with respect to the one arm around a shaft axis of the shaft;
the shaft comprising:
a first shaft portion fixed to the one arm and having an axis coaxial with the shaft axis; and
a second shaft portion fixed to the another arm and connected to the first shaft portion via a bearing such that the second shaft portion is rotatable around the shaft axis relatively with respect to the first shaft portion; and
a motor provided at the one arm or the another arm to rotate the second shaft portion relatively with respect to the first shaft portion around the shaft axis.